Annelies delabie002 sq
Annelies Delabie is a principal member of the technical staff at imec and full professor at the chemistry department at KU Leuven (University of Leuven). She holds a PhD degree in science from the KU Leuven (2001). Her research focusses on thin film deposition and surface modification for applications in nano-electronic devices. In particular, she investigates the growth and reaction mechanisms during atomic layer deposition and chemical vapor deposition to control the deposition at the nanoscale and to design bottom-up techniques like area-selective deposition. She participates in the committees of the American Vacuum Society conference on Atomic Layer Deposition and the Area-Selective Deposition Workshop.